E01600 - SEMI E16 - Guide for Determining and Describing Mass Flow Controller Leak Rates

Volume(s): Equipment Automation Hardware / Facilities
Language: English
Type: Single Standards Download (.pdf)

The purpose of this Guide is to establish a uniform, worldwide means for describing and measuring leak rates of mass flow controllers (MFCs). The leak integrity of a gas delivery system is important to maintaining product quality and performance. This Guide is intended to prevent confusion and misunderstanding between manufacturers and users. In particular, it distinguishes between mechanical and diffusion leak rates.

This Guide contains definitions of terms and procedures for determining the leak rates of MFCs as used in the semiconductor industry.


Referenced SEMI Standards (purchase separately)



Revision History

SEMI E16-0517 (technical revision)

SEMI E16-0611 (technical revision)

SEMI E16-90 (Reapproved 1104)

SEMI E16-90 (Reapproved 0699)

SEMI E16-90 (first published)

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