SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 28, 2017. Available at www.semiviews.org and www.semi.org in March 2018; originally published in 1991; previously published October 2011.
The purpose of this Standard is to provide a test method for measurement of mass flow controller (MFC) transient characteristics.
This Standard is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC ‘response time.’ The conditions and procedures are given for determining and expressing the transient characteristics of a MFC to a step change in set point. This Standard applies to mass flow controllers for gases used in semiconductor fabrication equipment.
Referenced SEMI Standards