SEMI E17 - Guide for Mass Flow Controller Transient Characteristics Tests
The purpose of this Standard is to provide a test method for measurement of mass flow controller (MFC) transient characteristics.
This Standard is intended to establish a common basis for communication between users and suppliers of semiconductor equipment. It provides terminology and methodology aimed at eliminating confusion regarding what previously has been referred to as MFC ‘response time.’ The conditions and procedures are given for determining and expressing the transient characteristics of a MFC to a step change in set point. This Standard applies to mass flow controllers for gases used in semiconductor fabrication equipment.
Referenced SEMI Standards
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