SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller -
Abstract
The purpose of this Guide is to establish a uniform, worldwide means to describe the temperature parameters which are characteristic of mass flow controllers. It is intended to prevent confusion and misunderstanding between manufacturers and users.
This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry.
Referenced SEMI Standards
SEMI E12 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
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