E01800 - SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller

SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E18-1017 - Current

Revision

Abstract

 

1  Purpose
1.1  The purpose of this Guide is to establish a uniform, worldwide means to describe the temperature parameters which are characteristic of mass flow controllers. It is intended to prevent confusion and misunderstanding between manufacturers and users.
2  Scope
2.1  This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
None.

 

Revision History
SEMI E18-1017 (technical revision)
SEMI E18-0211 (technical revision)
SEMI E18-91 (Reapproved 1104)
SEMI E18-91 (Reapproved 0299)
SEMI E18-91 (first published)

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