SEMI E18 - Guide for Temperature Specifications of the Mass Flow Controller
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in October 2017; originally published in 1991; previously published February 2011.
The purpose of this Guide is to establish a uniform, worldwide means to describe the temperature parameters which are characteristic of mass flow controllers. It is intended to prevent confusion and misunderstanding between manufacturers and users.
This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry.
Referenced SEMI Standards
SEMI E12 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers