SEMI E19 - Specification for Standard Mechanical Interface (SMIF)

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: SEMI E19.4 and SEMI E19.5 are no longer published within the SEMI E19 family of Standards. They are each published and sold separately. 

 

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 1216. Available at www.semiviews.org and www.semi.org in April 2017; originally published in 1991; previously published January 2017.

 

Note: This Standard has been purposely restricted to 100 mm (4 in.), 125 mm (5 in.), and 150 mm (6 in.) versions of the SMIF port. This has been done to establish a base for SMIF port standardization. Aspects of the 200 mm (8 in.) version have been negotiated by interested parties and published as SEMI E19.4.

 

A standard interface is required for containers intended to control the transport environment of cassettes containing wafers or disks. The interface must address the proper container orientation for material transfer and maintain continuity between the container and equipment environment in order to control particulate matter.

 

This Specification describes one approach to interfacing a clean cassette transport box to a clean environmental housing on a piece of semiconductor processing equipment or to other clean environments. The system concept involves mating a door on a cassette container to a door on an equipment canopy and transferring the cassette into, and out of, the equipment without exposing the cassette and wafers to outside contamination.

 

Subordinate Standards:

SEMI E19.1-0417 —  Specification for 100 mm (4 inch) Port for Standard Mechanical Interface (SMIF)

SEMI E19.2-0417 — Specification for 125 mm (5 inch) Port for Standard Mechanical Interface (SMIF)

SEMI E19.3-0417 — Specification for 150 mm (6 inch) Port for Standard Mechanical Interface (SMIF)

 

Referenced SEMI Standards

SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers
SEMI E15 — Specification for Tool Load Port
SEMI E111 — Mechanical Specification for a 150mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle

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