SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF)

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: SEMI E19.4 is no longer published within the SEMI E19 family of Standards. It is published and sold separately.

 

A standard interface is required for containers intended to control the transport environment of cassettes containing substrates. The interface must address the proper container orientation for material transfer and maintain continuity between the container and equipment environment in order to control particulate matter.

 

This Specification describes one approach to interfacing a clean cassette transport box to a clean environmental housing on a piece of semiconductor processing equipment or to other clean environments. The system concept involves mating a door on a cassette container to a door on an equipment enclosure and transferring the cassette into, and out of, the equipment without exposing the cassette and substrates to outside contamination.

 

The incorporation of this Standard may require equipment designers to include the features of the interface into the tool design. Spacing between open cassette ports must be considered when incorporating this interface. Designers are directed to the specifications and recommendations made in SEMI E15 in this regard.

 

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port
SEMI E19 — Specification for Standard Mechanical Interface (SMIF)

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