SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) -
NOTICE: SEMI E19.4 is no longer published within the SEMI
E19 family of Standards. It is published and sold separately.
A standard interface is required for containers intended to
control the transport environment of cassettes containing substrates. The
interface must address the proper container orientation for material transfer
and maintain continuity between the container and equipment environment in
order to control particulate matter.
This Specification describes one approach to interfacing a
clean cassette transport box to a clean environmental housing on a piece of
semiconductor processing equipment or to other clean environments. The system
concept involves mating a door on a cassette container to a door on an
equipment enclosure and transferring the cassette into, and out of, the
equipment without exposing the cassette and substrates to outside contamination.
The incorporation of this Standard may require equipment
designers to include the features of the interface into the tool design.
Spacing between open cassette ports must be considered when incorporating this
interface. Designers are directed to the specifications and recommendations
made in SEMI E15 in this regard.
Referenced SEMI Standards (purchase separately)
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Specification for Standard Mechanical Interface
SEMI E19.4-0417 (technical revision)
SEMI E19.4-0912 (technical revision)
SEMI E19.4-0998E (Reapproved 0709)
SEMI E19.4-0998E (Reapproved 0703)
SEMI E19.4-0998E (editorial revision)
SEMI E19.4-0998 (technical revision)
SEMI E19.4-94 (technical revision)
SEMI E19.4-92 (first published)
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