SEMI E19.5 - Specification for 300 mm Bottom-Opening Standard Mechanical Interface (SMIF)

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTE: SEMI E19.5 is no longer published within the SEMI E19 family of standards. It is published and sold separately on this page.

 

NOTICE: This document was balloted and approved for withdrawal in 2003.

 

This standard specifies a standard interface for containers intended to control the transport environment of contained wafers. The interface must address the proper container orientation for material transfer and maintain continuity between the container and equipment environment in order to control particulate and non-particulate contamination.

 

Referenced SEMI Standards

SEMI E15.1 — Provisional Specification for 300 mm Tool Load Port

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