SEMI E20 - Cluster Tool Module Interface: Electrical Power and Emergency Off Standard
This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1991; previously published November 2002.
NOTICE: This document was balloted and approved for withdrawal in 2010.
The purpose of the standard is to specify the Emergency Off capability to the modules of a cluster tool; to allow module Emergency Off disconnect and reconnect in a safe manner without removing power from the rest of the tool; and to prevent power from being applied to a module when its Emergency Off is non-functional.
Referenced SEMI Standards
SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard