SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 30, 2010. Available at and in June 2010; originally published in 1991; previously published November 2004.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


Cassette transfer between process equipment and transport equipment is performed by means of a mechanical operation in the interactive area and requires quick response and reliable interlock signals.


The purpose of this Specification is to provide a cassette transfer parallel input/output (I/O) interface for control of the interface mechanism that supplements the SECS standard for material movement.


This Specification deals with the parallel I/O interface for the cassette transfer between two pieces of equipment, such as a piece of process equipment and a piece of transport equipment.


This Standard defines the wire-connected parallel I/O interface between two pieces of equipment and the photo-coupled parallel I/O interface between the process equipment and the transport equipment.


The application of the parallel I/O interface to the cassette transport is as follows.


Each piece of equipment is connected to the HOST at the SECS interface, and each of the two pieces of equipment between which the cassette transfer will be made is connected at the parallel I/O interface as shown in Figure 1.


The cassette transfer request, or load/unload command, is notified by the SECS-II message. The actual cassette transfer action is executed using the parallel I/O interface, interlocking each mechanism. (An example of a cassette transfer transaction using the parallel I/O interface is shown in Related Information 1.)


Referenced SEMI Standards

SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

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