SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

Cassette transfer between process equipment and transport equipment is performed by means of a mechanical operation in the interactive area and requires quick response and reliable interlock signals.

 

The purpose of this Specification is to provide a cassette transfer parallel input/output (I/O) interface for control of the interface mechanism that supplements the SECS standard for material movement.


This Specification deals with the parallel I/O interface for the cassette transfer between two pieces of equipment, such as a piece of process equipment and a piece of transport equipment.

 

This Standard defines the wire-connected parallel I/O interface between two pieces of equipment and the photo-coupled parallel I/O interface between the process equipment and the transport equipment.

 

Referenced SEMI Standards

SEMI E1 — Specification for Open Plastic and Metal Wafer Carriers

SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II) 

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