SEMI E26 - Radial Cluster Tool Footprint Standard
This standard was technically approved by the global Physical Interfaces & Carriers Committee and is the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition reapproved by the North American Regional Standards Committee on August 16 2004. Initially available at www.semi.org September 2004; to be published November 2004. Originally published in 1992; last published June 1999.
NOTICE: This document was balloted and approved for withdrawal in 2004.
The purpose of the standard is to ensure that modules from different suppliers can be integrated into a radial cluster tool. It provides design specifications to equipment manufacturers so that physical interference between adjacent modules in a radial cluster tool is avoided and access to all modules of the cluster tool is guaranteed.
SEMI E26.1-92 (Withdrawn 1104) - Radial Cluster Tool Footprint 300 mm Standard
Referenced SEMI Standards
SEMI E21 — Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard
SEMI E22 — Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard
SEMI E25 — Cluster Tool Module Interface: Module Access Guideline