SEMI E27 - Guide for Mass Flow Controller and Mass Flow Meter Linearity

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at and in October 2017; originally published in 1992; previously published June 2011.


The purpose of this Standard is to establish a uniform, worldwide definition of linearity in order to prevent confusion and misunderstanding between manufacturers and users of mass flow devices. A linearity specification is used to allow prediction to a known level of uncertainty, the output of a mass flow controller (MFC) at points other than those at which its output is known.


The scope is to define the linearity of the MFC (controller with integral flow transducer and control valve) and the mass flow meter (MFM) (flow transducer only). Terminal-based linearity is used to describe the linearity of MFCs and MFMs.


Referenced SEMI Standards


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