SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller -

Abstract

1  Purpose
1.1  The purpose of this Guide is to establish a uniform, worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC). It is intended to prevent confusion and misunderstanding between manufacturers and users.
2  Scope
2.1  This Guide contains definitions of terms which describe gas pressure in MFCs as used in the semiconductor industry. SI units are the reference units for this Guide.

Referenced SEMI Standards (purchase separately)
SEMI E12 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers

Revision History
SEMI E28-0218 (technical revision)
SEMI E28-1110 (technical revision)
SEMI E28-92 (Reapproved 0710)
SEMI E28-92 (Reapproved 1104)
SEMI E28-92 (Reapproved 0299)
SEMI E28-92 (first published)

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