E02900 - SEMI E29 - マスフローコントローラ及びマスフローメータの校正のための標準用語

Volume(s): Equipment Automation Hardware
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Gases Committeeで技術的に承認されている。現版は2010430日,global Audits and Reviews Subcommitteeにて発行が承認された。20106月にwww.semi.orgで入手可能となる。初版は1993年発行。前版は200411月発行。




Referenced SEMI Standards

SEMI E12 — Standard for Standard Pressure and Standard Temperature for Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI E18 — Guideline for Temperature Specifications of the Mass Flow Controller
SEMI E28 — Guideline for Pressure Specifications of the Mass Flow Controller

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