SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters
NOTICE: This Document was reapproved with minor editorial changes.
This Standard defines terms commonly used in the calibration of mass flow controllers (MFC) and mass flow meters (MFM). It is intended to provide for worldwide terminology to be used by manufacturers and users.
This Standard defines terminology related to MFC/MFM calibration. At present, there are often several words used by the semiconductor industry to describe the same concept or device. This Standard is intended to eliminate confusion and provide for a common language which users and manufacturers can employ to discuss MFC/MFM calibration.
Referenced SEMI Standards
SEMI E12 — Guide for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI E18 — Guide for Temperature Specifications of the Mass Flow Controller
SEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller
|Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.|
Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.