SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at and in April 2017; originally published in 1993; previously published November 2010.


NOTICE: This Document was reapproved with minor editorial changes.<br>This Standard defines terms commonly used in the calibration of mass flow controllers (MFC) and mass flow meters (MFM). It is intended to provide for worldwide terminology to be used by manufacturers and users.


This Standard defines terminology related to MFC/MFM calibration. At present, there are often several words used by the semiconductor industry to describe the same concept or device. This Standard is intended to eliminate confusion and provide for a common language which users and manufacturers can employ to discuss MFC/MFM calibration.


Referenced SEMI Standards

SEMI E12 — Guide for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI E18 — Guide for Temperature Specifications of the Mass Flow Controller
SEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller

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