SEMI E29 - Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters -

Abstract

This Standard defines terms commonly used in the calibration of mass flow controllers (MFC) and mass flow meters (MFM). It is intended to provide for worldwide terminology to be used by manufacturers and users.

This Standard defines terminology related to MFC/MFM calibration. At present, there are often several words used by the semiconductor industry to describe the same concept or device. This Standard is intended to eliminate confusion and provide for a common language which users and manufacturers can employ to discuss MFC/MFM calibration.

Referenced SEMI Standards (purchase separately)
SEMI E12 — Guide for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers
SEMI E18 — Guide for Temperature Specifications of the Mass Flow Controller
SEMI E28 — Guide for Pressure Specifications of the Mass Flow Controller

Revision History
SEMI E29-1223 (technical revision)
SEMI E29-1110 (Reapproved 0417)
SEMI E29-1110 (technical revision)
SEMI E29-93 (Reapproved 0710)
SEMI E29-93 (Reapproved 1104)
SEMI E29-93 (Reapproved 0299)
SEMI E29-93 (first published)

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