SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) -

Abstract

This Standard establishes a Specific Equipment Model (SEM) for Inspection and Review Equipment (ISEM). The model consists of equipment characteristics and behavior that are to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The intent of this Standard is to facilitate the integration of ISEM equipment into an automated (semiconductor fabrication) factory. This Document accomplishes this by defining an operational model for ISEM equipment as viewed by a factory automation controller. This definition provides a standard host interface and equipment operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional activity that are within the scope of this Standard: substrate pattern maps; defect classification code management; and review data management.

The scope of this Standard is limited to the definition of Inspection, Review, and Inspection/ Review equipment behavior as perceived by a SEMI Equipment Communications Standard II (SEMI E5/SECS-II) host that complies with SEMI E30. It defines the external view of the equipment through the SECS link; it does not define the internal operation of the equipment. This Standard expands the SEMI E30 requirements and capabilities in the areas of the processing state model, remote commands, variable items, alarms, and data collection.

This Standard is intended for ISEM equipment that generates data and information about anomalies and defects found on substrates. Inspection equipment finds anomalies. Anomalies are occurrences on a substrate that have been judged to be unexpected, abnormal, incongruous, or inconsistent. Anomalies may be examined using review equipment, at which time they may be classified as defects or non-defects. Some inspection equipment may generate, and some review equipment may use, coordinate data to locate anomalies on a substrate. The accuracy of the coordinate data generated or used is equipment-dependent.

Referenced SEMI Standards (purchase separately)

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E37.1 — High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI M20 — Practice for Establishing a Wafer Coordinate System

SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

Revision History

SEMI E30.1-0217 (Reapproved 0423)

SEMI E30.1-0217 (title change)

SEMI E30.1-0309 (technical revision)

SEMI E30.1-1106 (technical revision)

SEMI E30.1-0200 (technical revision)

SEMI E30.1-0698 (first published)

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