SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM) -

Abstract

This Standard establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities.

The scope of this Standard is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model. It defines the view of the equipment through the SECS II link. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for all equipment behavior of this class.

This Standard assumes that the SEMI E30 fundamental requirements and all additional capabilities except those noted in SEMI E30 Capabilities Section in this Standard have been implemented on the MSEM equipment. This Standard expands the SEMI E30 Standard requirements and capabilities in the areas of the processing state model, collection events, Process Program management, remote commands, data item variables, and coordinate systems.

Referenced SEMI Standards (purchase separately)

SEMI E5 ¾ SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E37.1 ¾ High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)

SEMI E58 ¾ Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI M20 — Practice for Establishing a Wafer Coordinate System

SEMI M21 ¾ Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

Revision History

SEMI E30.5-0302 (Reapproved 0423)

SEMI E30.5-0302 (Reapproved 0217)

SEMI E30.5-0302 (Reapproved 0308)

SEMI E30.5-0302 (technical revision)

SEMI E30.5-0701 (first published)

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