SEMI E30.5 - Specification for Metrology Specific Equipment Model (MSEM)
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 31, 2016. Available at www.semiviews.org and www.semi.org in February 2017; originally published in 2001; previously published March 2008.
NOTE: The complete Specification for this product includes all general requirements of SEMI E30.
This Document establishes a Specific Equipment Model (SEM) for Metrology equipment (MSEM). The MSEM consists of equipment characteristics and behaviors that are applicable to this class of equipment and are required to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities.
The scope of this Document is limited to defining the behavior of Metrology equipment as perceived by a SEMI Equipment Communications Standard 2 Message Content (SECS-II) host that complies with the SEMI E30 model. It defines the view of the equipment through the SECS II link. It does not define the internal operation of the equipment. It includes a specific processing state model as the basis for all equipment behavior of this class.
This Document assumes that the SEMI E30 fundamental requirements and all additional capabilities except those noted in SEMI E30 Capabilities Section in this Document have been implemented on the MSEM equipment. This Document expands the SEMI E30 Standard requirements and capabilities in the areas of the processing state model, collection events, Process Program management, remote commands, data item variables, and coordinate systems.
Referenced SEMI Standards
SEMI E5— SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E37.1— High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)
SEMI E58— Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
SEMI M20 — Practice for Establishing a Wafer Coordinate System
SEMI M21 — Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array