SEMI E32 - Material Movement Management (MMM)
This Standard was technically approved by the Information & Control Global Technical Committee. Available at www.semi.org in September 1997; originally published in 1994.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
Automated material movement represents a significant milestone in the evolution of automation in semiconductor manufacturing. The standardization of the transfer process is critical to the economic viability of material movement automation. This Standard addresses the communications needs of the semiconductor manufacturing facility with respect to material movement.
This Standard addresses automated material movement on the semiconductor factory floor—the task of transporting objects (material, et al.) from one processing or storage location to another. It defines the concepts of material movement, the behavior of the equipment (including transfer devices) in relation to material movement, and the messaging services which are needed to accomplish the task.
SEMI E32.1-0997 - SECS-II Support for Material Movement
Referenced SEMI Standards
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Specification for Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services