SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment
This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at www.semi.org in October 2010; originally published in 1995.
NOTICE: This Document was completely rewritten in 2010.
NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving mass flow devices that have been exposed to hazardous materials.
This Safety Guideline is intended to:
Encourage the purging of devices used with hazardous materials prior to removal to reduce the risk of chemical injury and equipment damage while handling them.
Establish a process for properly identifying and documenting such mass flow devices by using an orange tag and a health and safety disclosure form.
Establish a means of alerting the recipients of such mass flow devices to the hazards.
This Safety Guideline applies to mass flow devices that have been exposed to hazardous materials.
Referenced SEMI Standards