SEMI E34 - Safety Guideline for Mass Flow Device Removal and Shipment

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


NOTICE: This Document was completely rewritten in 2010.


This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving mass flow devices that have been exposed to hazardous materials.


This Safety Guideline is intended to:

Encourage the purging of devices used with hazardous materials prior to removal to reduce the risk of chemical injury and equipment damage while handling them.

Establish a process for properly identifying and documenting such mass flow devices by using an orange tag and a health and safety disclosure form.

Establish a means of alerting the recipients of such mass flow devices to the hazards.

This Safety Guideline applies to mass flow devices that have been exposed to hazardous materials.


Referenced SEMI Standards


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