E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published in 1995; previously published March 2012.


The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries.


This Guide establishes a procedure to facilitate an understanding of equipment-related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values necessary to build a comprehensive, constrained, or monitor COO calculator.


This Guide is applicable to any type of equipment for processing semiconductor units, which may be integrated circuit (IC) wafers and devices. It may also be applicable to any type of manufacturing equipment for processing of a flat panel display (FPD), photovoltaic (PV), micro electro-mechanical systems (MEMS), high-brightness light emitting diode (HB-LED), hard disk drive (HDD), or other types of production units. Some terms are specialized to IC wafer and device production.


Effective use of the metric to build a COO model requires identification of constraints and data values. Where possible, use direct values for inputs rather than deriving them from secondary models or using example values.


Full calculation of COO often requires data held proprietary and is coupled to the overall factory yield and the related cost of yield loss. It is envisioned that this Guide will be used for internal factory and equipment optimization, investment evaluation, and equipment design and process improvements.


Referenced SEMI Standards

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization
SEMI E72 — Specification and Guide for Equipment Footprint, Height, and Weight
SEMI E89 — Guide for Measurement System Analysis (MSA)
SEMI E79 — Specification for Definition and Measurement of Equipment Productivity
SEMI S12 — Environmental, Health, and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

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