SEMI E36 - Semiconductor Equipment Manufacturing Information Tagging Specification -

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Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E36-0704 - Inactive



This specification was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on December 18, 1998. Initially available at February 1999; to be published June 1999. Originally published 1995; previous published revision February 1998.


NOTICE: The designation of this standard was updated during the 0704 publishing cycle to reflect the creation of SEMI E36.1.


The purpose of Semiconductor Equipment Manufacturing Information Tagging is to define a markup philosophy, a markup framework, and an information markup which is rich enough to facilitate: electronic interchange and distribution of information; quality hardcopy printing and screen display of information; consistent high-precision online searching; and reuse and repurposing of information for such applications as integrating source material into training material and online support applications. The intent of this document is to create an information interchange specification, not an authoring specification or an electronic presentation specification. Semiconductor Equipment Manufacturing Information Tagging will define the markup necessary for exchanging documents electronically, for facilitating retrieval of information content, and for validating information interchanges.


Subordinate Standard:

SEMI E36.1-0704 - Specification for the Semiconductor Equipment Manufacturing Information Tagging Standard E36


Referenced SEMI Standards


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