SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services
High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another.
HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other attributes of HSMS are not required.
HSMS is also intended as an alternative to SEMI E13 (SECS Message Services) for applications where TCP/IP is preferred over OSI.
It is intended that HSMS be supplemented by subsidiary standards which further specify details of its use or impose restrictions on its use in particular application domains.
HSMS defines a communication interface suitable for the exchange of messages between computers in a semiconductor factory.
SEMI E37.1-0819 — Specification for High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS)
SEMI E37.2-95 (Withdrawn 1109) — High-Speed SECS Message Services General Session (HSMS-GS)
Referenced SEMI Standards
SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E173 — Specification for XML SECS-II Message Notation (SMN)