SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services -

Member Price: $267.00
Non-Member Price: $355.00

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E37-0222 - Current



High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another.


HSMS is intended as an alternative to SEMI E4 (SECS-I) for applications where higher speed communication is needed or when a simple point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in applications where these and other attributes of HSMS are not required.


HSMS is also intended as an alternative to SECS Message Services for applications where TCP/IP is preferred over OSI.


It is intended that HSMS be supplemented by Subordinate Standards which further specify details of its use or impose restrictions on its use in particular application domains.

HSMS defines a communication interface suitable for the exchange of messages between computers in a semiconductor factory.


Subordinate Standards (included):

SEMI E37.1-0819 — Specification for High-Speed SECS Message Services Single Selected-Session Mode (HSMS-SS) 

SEMI E37.2-95 (Withdrawn 1109) — High-Speed SECS Message Services General Session (HSMS-GS)


Referenced SEMI Standards (purchase separately)

SEMI E4 — Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)


Revision History

SEMI E37-0222 (technical revision)

SEMI E37-0819 (technical revision)

SEMI E37-1018 (technical revision)

SEMI E37-0413 (designation update)

SEMI E37-1109 (designation update)

SEMI E37-0308 (Reapproved 0708)

SEMI E37-0308 (designation update)

SEMI E37-0413 (designation update)

SEMI E37-0303 (designation update)

SEMI E37-0702 (technical revision)

SEMI E37-0298 (technical revision)

SEMI E37-95 (first published)


SEMI E37.1-0819 (technical revision)

SEMI E37.1-0702 (Reapproved 0413)

SEMI E37.1-0702 (Reapproved 0308)

SEMI E37.1-0702 (technical revision)

SEMI E37.1-96E (editorial revision)

SEMI E37.1-95 (first published)


SEMI E37.2-95 (Withdrawn 1109)

SEMI E37.2-95 (Reapproved 0303)

SEMI E37.2-95 (first published)

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