SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services -
Abstract
High-Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another.
HSMS is intended as an alternative to SEMI E4 (SECS-I) for
applications where higher speed communication is needed or when a simple
point-to-point topology is insufficient. SEMI E4 (SECS-I) can still be used in
applications where these and other attributes of HSMS are not required.
HSMS is also intended as an alternative to SECS Message
Services for applications where TCP/IP is preferred over OSI.
It is intended that HSMS be supplemented by Subordinate Standards
which further specify details of its use or impose restrictions on its use in
particular application domains.
HSMS defines a communication interface suitable for the
exchange of messages between computers in a semiconductor factory.
Subordinate Standards (included):
SEMI E37.1-0819 — Specification for High-Speed SECS Message
Services Single Selected-Session Mode (HSMS-SS)
SEMI E37.2-95 (Withdrawn 1109) — High-Speed SECS Message
Services General Session (HSMS-GS)
Referenced SEMI Standards (purchase separately)
SEMI E4 — Specification for SEMI Equipment Communications
Standard 1 Message Transfer (SECS-I)
SEMI E5 — Specification for SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
Revision History
SEMI E37-0222 (technical revision)
SEMI E37-0819 (technical revision)
SEMI E37-1018 (technical revision)
SEMI E37-0413 (designation update)
SEMI E37-1109 (designation update)
SEMI E37-0308 (Reapproved 0708)
SEMI E37-0308 (designation update)
SEMI E37-0413 (designation update)
SEMI E37-0303 (designation update)
SEMI E37-0702 (technical revision)
SEMI E37-0298 (technical revision)
SEMI E37-95 (first published)
SEMI E37.1-0819 (technical revision)
SEMI E37.1-0702 (Reapproved 0413)
SEMI E37.1-0702 (Reapproved 0308)
SEMI E37.1-0702 (technical revision)
SEMI E37.1-96E (editorial revision)
SEMI E37.1-95 (first published)
SEMI E37.2-95 (Withdrawn 1109)
SEMI E37.2-95 (Reapproved 0303)
SEMI E37.2-95 (first published)
Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards. |
Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.
This product has no reviews yet.