E03900 - SEMI E39 - オブジェクトサービス・スタンダード:概念,挙動およびサービス

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)



Subordinate Document:

SEMI E39.1-0703 (Reapproved 1109) — SECS-II Protocol for Object Services Standard (OSS)


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

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