SEMI E40 - Specification for Processing Management

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.org in December 2018. Originally published in 1995; previously published August 2013.

 

Automated management and command of material processing in equipment is a crucial aspect enabling factory automation. This Standard addresses the communications needs within the semiconductor manufacturing environment with respect to the processing of material in equipment.

 

This Standard specifies the application of the appropriate processing to specified material received at the processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to processing, and the messaging services which are needed to accomplish the task.

 

The communications services defined here enable standards-based interoperability of independent systems. They allow application software to be developed that can assume the existence of these services and allow software products to be developed which offer them.

 

Implementation of automated processing management will help eliminate misprocessing of material. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard services.

 

The scope of this Standard is automated material processing based on discrete processing jobs. It provides the functionality required for process management for modules within a cluster tool. It may be applied to sub-systems of other multi-resource equipment, as well as to host control of many types of equipment.

 

This Standard supports individual management of jobs for identical processing of material within a group and concurrent processing of independent groups. Where material contains other material (such as carriers containing wafers), processing may be specified in terms of either material type.

 

A simple tuning mechanism is provided for limited feedforward and feedback control between process steps. A method is defined for taking advantage of recipe variable parameters. This is not expected to satisfy all closed loop control requirements. Other mechanisms are anticipated with greater flexibility for late tuning and handling complex data.

 

This Standard does not provide services for receiving material for processing, or disposing of it after processing is complete. Automation of material transfer is assumed to be provided through other services, such as those defined in applicable SEMI Standards.

 

This Standard presents a solution from the concepts and behavior down to the messaging services. It does not define the messaging protocol.

 

A messaging service includes the identification that a message shall be exchanged and a definition of the data which is contained in that message. It does not include information on the structure of the message, how the data is represented within the message, or how the message is exchanged. This additional information is contained within the message protocol.

 

The defined services may be applied to multiple protocols. Information on the mapping of processing management services to special protocols (e.g., SECS-II) are added as adjunct standards.

 

The services assume a communications environment in which a reliable connection has been established between the user of the services and the provider of the services. Establishing, maintaining, releasing a connection, and handling communication failures are beyond the scope of this Standard.

 

Subordinate Standard:

SEMI E40.1-1218 — Specification for SECS-II Support for Processing Management

 

Referenced SEMI Standards

SEMI E5 — Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services

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