SEMI E41 - Exception Management (EM) Standard
Interactive exception handling enhances the error recovery ability while maintaining automated control in the factory. This standard addresses the communications needs within the semiconductor manufacturing environment with respect to equipment exception handling. This standard specifies capabilities to be provided by the exception agent for effective reporting and interaction with respect to abnormal situations in the equipment. It describes the concept of exception management, the behavior of the equipment in relation to interactive exception handling, and the messaging services which are needed to provide the functionality. The communications services defined here will enable standards-based interoperability of independent systems. They shall allow application software to be developed which can assume the existence of these services and allow software products to be developed which offer them. Implementation of automated exception management will help reduce error recovery time and avoid changing from automatic to manual equipment control in many situations. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components. Compliance requires a specific set of standard services.
SEMI E41.1-0996 — SECS-II Support for the Exception Management Standard
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)