SEMI E42 - Recipe Management Standard: Concepts, Behavior, and Message Services

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This standard was technically approved by the global Information & Control Committee and is the direct responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be published July 2004. Originally published September 1995; previously published February 2000.

 

E This standard was editorially modified in September 1999 to conform to its non-provisional status. Changes were made to Section 1.2.

 

This standard defines the concepts required for management of recipes, the operations or behavior provided by the Recipe Management Standard (RMS), and the messages through which services are provided through an interface between the provider and the user of these services. The purpose of this standard is twofold: to enable applications software to be developed that can assume the existence of standard concepts, behaviors, and message services that collectively form Recipe Management and that take advantage of them; and to enable software to be developed to offer the Recipe Management capabilities.

 

Subordinate Standard:

SEMI E42.1-0704 — Standard for SECS-II Protocol for Recipe Management Standard (RMS)

 

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting

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