SEMI E43 - Guide for Electrostatic Measurements on Objects and Surfaces
This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in August 2013. Originally published in 1995; previously published November 2008.
The purpose is to provide guidance for reproducible electrostatic measurements on any surface or object, consistent with the scope and limitations set forth below.
The measurement methods described herein can be applied to characterize the general electrostatic charge, voltage, field level(s), and electrostatic discharge (ESD) on objects and surfaces in semiconductor manufacturing environments. Acceptable equipment, calibration, and measurement techniques are described in this Document. Appendices include background information on the equipment specified and calibration procedures, as well as information and advice on performing a useful general electrostatic survey.
Referenced SEMI Standards
SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)