E04700 - SEMI E47 - 150 mm/200 mm用ポッドハンドルの仕様

Volume(s): Equipment Automation Hardware
Language: Japanese
Type: Single Standards Download (.pdf)

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.





本スタンダードは,Physical Interfaces & Carriers Global Technical Committeeで技術的に承認されている。現版は2011年12月24日,global Audits and Reviews Subcommitteeにて発行が承認された。2012年5月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は1995年発行。前版は2006年11月発行。


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.




本仕様は,150 mm/200 mmのポッドについて,ハンドルの寸法と配置を定める。これらは,自動操作であるが,手動操作も考慮している。個々の手動ハンドルの設計は,この基準の寸法的な制限内で完成させることは自由である。


Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port
SEMI E19.3 — 150 mm Standard Mechanical Interface (SMIF)
SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)
SEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers
SEMI T4 — Specification for 150 mm and 200 mm Pod Identification Dimensions

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