SEMI E47 - Specification for 150 mm/200 mm Pod Handles

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


NOTICE: This Document was reapproved with minor editorial changes.

 

This Specification provides a unified form and location for pod handles to enable automatic pod handling.


This Specification defines the dimensions and location of handles on 150 mm/200 mm pod. These provide automatic handling and take into consideration manual handling. The design of individual manual handles is open to be accomplished within the dimensional limitations of the Standard.

  

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E19.3 — 150 mm Standard Mechanical Interface (SMIF)

SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)

SEMI E47.1 — Mechanical Specification for Boxes and Pods Used to Transport and Store 300 mm Wafers

SEMI T4 — Specification for 150 mm and 200 mm Pod Identification Dimensions

 

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