E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility.


This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces (other than the door mechanism and kinematic couplings) for FOUPs are specified; no materials requirements or micro-contamination limits are given. The enclosure specified in this Standard can be a sealed minienvironment, but it could also just be a box with well-defined interfaces.

 

Referenced SEMI Standards (purchase separately)

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E19 — Standard Mechanical Interface (SMIF)

SEMI E47 — Specification for 150 mm/200 mm Pod Handles

SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

 

Revision History

SEMI E47.1-1106 (Reapproved 0512)

SEMI E47.1-1106 (technical revision)

SEMI E47.1-0706 (technical revision)

SEMI E47.1-0306 (technical revision)

SEMI E47.1-0305 (technical revision)

SEMI E47.1-1104 (technical revision)

SEMI E47.1-0704 (technical revision)

SEMI E47.1-0304 (technical revision)

SEMI E47.1-0303 (technical revision)

SEMI E47.1-1101 (technical revision)

SEMI E47.1-0701 (technical revision)

SEMI E47.1-0301 (technical revision)

SEMI E47.1-0200 (technical revision)

SEMI E47.1-0999 (technical revision)

SEMI E47.1-0699 (technical revision)

SEMI E47.1-0298 (technical revision)

SEMI E47.1-0697 (first published)

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