SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers -
NOTICE: This Standard or Safety Guideline has an Inactive
Status because the conditions to maintain Current Status have not been met.
Inactive Standards or Safety Guidelines are available from SEMI and continue to
be valid for use.
This Standard partially specifies the FOUPs used to
transport and store 300 mm wafers in an IC manufacturing facility.
This Standard is intended to set an appropriate level of
specification that places minimal limits on innovation while ensuring
modularity and interchangeability at all mechanical interfaces. Most of the
requirements given in this Specification are in the form of maximum or minimum
dimensions with very few required surfaces. Only the physical interfaces (other
than the door mechanism and kinematic couplings) for FOUPs are specified; no
materials requirements or micro-contamination limits are given. The enclosure
specified in this Standard can be a sealed minienvironment, but it could also
just be a box with well-defined interfaces.
Referenced SEMI Standards (purchase separately)
SEMI E1.9 — Mechanical Specification for Cassettes Used to
Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47 — Specification for 150 mm/200 mm Pod Handles
SEMI E57 — Mechanical Specification for Kinematic Couplings
Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface
Mechanical Standard (FIMS)
SEMI S8 — Safety Guidelines for Ergonomics Engineering of
Semiconductor Manufacturing Equipment
SEMI E47.1-1106 (Reapproved 0512)
SEMI E47.1-1106 (technical revision)
SEMI E47.1-0706 (technical revision)
SEMI E47.1-0306 (technical revision)
SEMI E47.1-0305 (technical revision)
SEMI E47.1-1104 (technical revision)
SEMI E47.1-0704 (technical revision)
SEMI E47.1-0304 (technical revision)
SEMI E47.1-0303 (technical revision)
SEMI E47.1-1101 (technical revision)
SEMI E47.1-0701 (technical revision)
SEMI E47.1-0301 (technical revision)
SEMI E47.1-0200 (technical revision)
SEMI E47.1-0999 (technical revision)
SEMI E47.1-0699 (technical revision)
SEMI E47.1-0298 (technical revision)
SEMI E47.1-0697 (first published)
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