SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in May 2012; originally published in 1997; previously published November 2006.
This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Most of the requirements given in this Specification are in the form of maximum or minimum dimensions with very few required surfaces. Only the physical interfaces (other than the door mechanism and kinematic couplings) for FOUPs are specified; no materials requirements or micro-contamination limits are given. The enclosure specified in this Standard can be a sealed minienvironment, but it could also just be a box with well-defined interfaces.
Referenced SEMI Standards
SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E47 — Specification for 150 mm/200 mm Pod Handles
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment