SEMI E48 - Specification for SMIF Indexer Volume Requirement
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The purpose of this Specification is to provide the volume required within a tool that enables integration of SMIF into tools with single or multiple ports.
This Specification defines the space necessary within a tool with respect to the interface plane. The specification refers to the Standard Mechanical InterFace (SMIF) Standard, SEMI E19.
Referenced SEMI Standards
SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
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