SEMI E48 - Specification for SMIF Indexer Volume Requirement -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

 

The purpose of this Specification is to provide the volume required within a tool that enables integration of SMIF into tools with single or multiple ports.

This Specification defines the space necessary within a tool with respect to the interface plane. The specification refers to SEMI E19, Standard Mechanical Interface (SMIF).

 

Referenced SEMI Standards (purchase separately)

SEMI E15 — Specification for Tool Load Port

SEMI E19 — Standard Mechanical Interface (SMIF)

 

Revision History

SEMI E48-1101 (Reapproved 1107)

SEMI E48-1101 (technical revision)

SEMI E48-0701 (technical revision)

SEMI E48-95 (Reapproved 0600)

SEMI E48-95 (first published)

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