SEMI E49 - 高純度および超高純度配管システムの性能,サブアセンブリ,最終組立のためのガイド

Volume(s): Equipment Automation Hardware

Language: Japanese

Type: Single Standards Download (.pdf)

SEMI Standards Copyright Policy/License Agreements

Abstract

本スタンダードは，global Gases Technical Committeeで技術的に承認されている。現版は2011年9月12日，global Audits and Reviews Subcommitteeにて発行が承認された。2011年12月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は1995年発行。前版は2004年11月発行。

注意: 本文書は，編集上の修正を伴い，再承認された。

本概説スタンダードの目的は，SEMI E49.2，SEMI E49.4，SEMI E49.5，SEMI E49.6，SEMI E49.7，SEMI E49.8，SEMI E137について一連の基本的な定義と参照文書を提供することである。

Subordinate Documents:

SEMI E49.2-1104 - Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

SEMI E49.4-0298 - Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.5-1104 - Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.6-1103 (Reapproved 1211) - Guide for Subsystem Assembly and Testing Procedures - Stainless Steel Systems

SEMI E49.7-0304 - Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

SEMI E49.8-1103 (Reapproved 1211) - Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

Referenced SEMI Standards

SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

SEMI E49.2 — Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

SEMI E49.4 — Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.5 — Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E49.6 — Guide for Subsystem Assembly and Testing Procedures – Stainless Steel Systems

SEMI E49.7 — Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment

SEMI E49.8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment

SEMI E137 — Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment