SEMI E49 - 高純度および超高純度配管システムの性能,サブアセンブリ,最終組立のためのガイド
本スタンダードは,global Gases Technical Committeeで技術的に承認されている。現版は2011年9月12日,global Audits and Reviews Subcommitteeにて発行が承認された。2011年12月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は1995年発行。前版は2004年11月発行。 注意: 本文書は,編集上の修正を伴い,再承認された。 本概説スタンダードの目的は,SEMI E49.2,SEMI E49.4,SEMI E49.5,SEMI E49.6,SEMI E49.7,SEMI E49.8,SEMI E137について一連の基本的な定義と参照文書を提供することである。 Subordinate Documents: SEMI E49.2-1104 - Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment SEMI E49.4-0298 - Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment SEMI E49.5-1104 - Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment SEMI E49.6-1103 (Reapproved 1211) - Guide for Subsystem Assembly and Testing Procedures - Stainless Steel Systems SEMI E49.7-0304 - Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment SEMI E49.8-1103 (Reapproved 1211) - Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
SEMI E49.2 — Guideline for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment
SEMI E49.4 — Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
SEMI E49.5 — Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
SEMI E49.6 — Guide for Subsystem Assembly and Testing Procedures – Stainless Steel Systems
SEMI E49.7 — Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment
SEMI E49.8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment
SEMI E137 — Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment
SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment