SEMI E52 - Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers -

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Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E52-1213 (Withdrawn 0714) - Withdrawn



This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at and in July 2014; originally published in 1995; previously published December 2013.


NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI AUX030.


To provide a numerical index of gases and gas mixtures used in the semiconductor industry that will give an ordered reference for the gases and gas mixtures when used in mass flow devices. This index or list will facilitate the production and use of digital mass flow devices.


The list includes gases, gas mixtures, and vaporizable materials that can be used in mass flow devices. The list will supplement, not replace, existing DOT/OSHA or other identification systems. For ease of use, the list is presented sorted by gas code, gas name, and symbol for gases and vaporizable materials and by code and mixture percentage for gas mixtures.


Referenced SEMI Standards


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