SEMI E54 - Specification for Sensor/Actuator Network
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at www.semiviews.org and www.semi.org in March 2016; originally published in 1997; previously published April 2013.
NOTICE: The Standard that was previously designated as SEMI E54 (Standard for Sensor/Actuator Network Common Device Model) has been re-designated as SEMI E54.1. Because the Sensor/Actuator Network Standard is the Parent Document, it has been designated as SEMI E54.
This Specification provides the structure of SEMIs Sensor/Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard-compliant Sensor/Actuator devices.
This Standard specifies how devices interoperate on a network as part of the control system for equipment.
This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components of the SEMI SAN Standard.
SEMI E54.1-0316 - Specification for Sensor/Actuator Network Common Device Model
SEMI E54.2-0316 - Guide for Writing Sensor/Actuator Network (SAN) Letter Ballots
Referenced SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object