E05403 - SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.

NOTICE: This Document was reapproved with minor editorial changes.


This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this Specification is to describe a network-independent application model comprised of device objects which are common to all mass flow devices (MFDs) on a semiconductor equipment Sensor/Actuator communications network.

This Specification specifically addresses the minimum attributes, services, and behavior a mass flow controller (MFC) and mass flow meter (MFM) device must support to be interoperable on the Sensor/Actuator Network.


This Specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator Network, while still allowing flexibility for product differentiation and technology evolution.


The model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the MFC or MFM as it appears from the network interface.


This Specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network Common Device Model, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the MFC and MFM.

To comply with this Specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these documents. Support for optional attributes, services, and behavior are not required to be compliant to this Specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device, they must be implemented as identified in this Standard.


Referenced SEMI Standards (purchase separately)

SEMI E12 — Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers

SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services

SEMI E52 — Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers (Replaced by SEMI AUX030)

SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model


Revision History

SEMI E54.3-0698 (Reapproved 0721)

SEMI E54.3-0698 (Reapproved 0616)

SEMI E54.3-0698 (Reapproved 1110)

SEMI E54.3-0698 (Reapproved 0704)

SEMI E54.3-0698 (first published)

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