SEMI E54.4 - Specification for Sensor/Actuator Network Communications for DeviceNet -

Abstract

This Standard defines a Communication Specification based on the DeviceNet® protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI-specified device models (common and device specific) in a semiconductor manufacturing tool.

Background and Motivation — DeviceNet provides for networking between simple industrial devices (e.g., sensors and actuators) and higher level devices such as controllers. DeviceNet provides:

• A solution to low-level device networking.
• Access to intelligence present in low-level devices.
• Master/Slave and Peer-to-Peer capabilities.

DeviceNet is based on the Controller Area Network (CAN) technology. CAN defines a media access control (MAC) methodology and physical signaling characteristics. DeviceNet wraps a communication model and protocol as well as a complete Physical Layer definition around CAN to provide a complete network definition.

This Specification enables communications between intelligent devices on a SEMI-compliant SAN by providing a presentation mapping of common and specific device network visible structure and behavior to a DeviceNet network.

This Standard specifies the protocol and services that compliant intelligent devices must support to interchange information over this semiconductor equipment SAN.

This Standard specifies the utilization of the DeviceNet protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDM’s), on a DeviceNet network.

This Specification is used in conjunction with SEMI E54.1, Specification for Sensor/Actuator Network Common Device Model, and one or more SEMI Standard-specific device model specifications (e.g., for a mass flow controller [MFC]). Together, they describe the externally visible data structure and behavior of devices using the DeviceNet networking capability in a SEMI-compliant SAN system.

This Standard, together with a SAN interoperability guideline, the SAN CDM, one or more SAN specific device model documents, and the DeviceNet specifications, form a complete interoperability Standard. The general SAN Document architecture is shown in the Sensor/Actuator Network Common Device Model Standard in Figure 1.

Referenced SEMI Standards (purchase separately)
SEMI E30 — Specification for the Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
SEMI E54.22 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
SEMI E54.24 — Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENSen)

Revision History
SEMI E54.4-0422 (technical revision)
SEMI E54.4-0316 (technical revision)
SEMI E54.4-1111 (technical revision)
SEMI E54.4-0704 (technical revision)
SEMI E54.4-0997 (first published - replaces SEMI E59)

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