SEMI E54.4 - Specification for Sensor/Actuator Network Communications for DeviceNet

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at and in March 2016; originally published September 1997; previously published November 2011.


NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.


This Standard defines a Communication Specification based on the DeviceNet protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI-specified device models (common and device specific) in a semiconductor manufacturing tool.


Background and Motivation — DeviceNet provides for networking between simple industrial devices (e.g., sensors and actuators) and higher level devices such as controllers. DeviceNet provides:

  • A solution to low-level device networking.

  • Access to intelligence present in low-level devices.

  • Master/Slave and Peer-to-Peer capabilities.


DeviceNet is based on the Controller Area Network (CAN) technology. CAN defines a media access control (MAC) methodology and physical signaling characteristics. DeviceNet wraps a communication model and protocol as well as a complete Physical Layer definition around CAN to provide a complete network definition.


This Document enables communications between intelligent devices on a SEMI-compliant SAN by providing a presentation mapping of common and specific device network visible structure and behavior to a DeviceNet network.


This Document specifies the protocol and services that compliant intelligent devices must support to interchange information over this semiconductor equipment SAN.


This Document specifies the utilization of the DeviceNet protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDM’s), on a DeviceNet network.


This Document is used in conjunction with a SEMI Standard SAN Common Device Model Specification and one or more SEMI Standard-specific device model specifications (e.g., for a mass flow controller [MFC]). Together, they describe the externally visible data structure and behavior of devices using the DeviceNet networking capability in a SEMI-compliant SAN system.


This Standard, together with a SAN interoperability guideline, the SAN CDM, one or more SAN specific device model documents, and the DeviceNet specifications, form a complete interoperability Standard. The general SAN Document architecture is shown in the Sensor/Actuator Network CDM Document in Figure 1.


Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

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