SEMI E54.8 - Specification for Sensor/Actuator for Network Communications for PROFIBUS-DP -

Abstract

This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 19, 2008. It was available at www.semi.org in February 2009. Originally published September 1999; previously published March 2005.

　

NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.

　

This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific communications protocol based on the PROFIBUS standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network standard suite and the PROFIBUS standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.

　

PROFIBUS is a vendor independent, open fieldbus standard for a wide range of applications in manufacturing, process and building automation. Vendor independence and openness are guaranteed by the IEC standards for PROFIBUS, IEC 61158 part 2, part 3-3 to part 6-3 and IEC 61784-1. PROFIBUS is optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at the device level.

　

This document specifies a SAN communications standard based on the PROFIBUS specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

　

In conjunction with a SEMI standard SAN Common Device Model (CDM) specification and one or more SEMI standard Specific Device Model (SDM) specifications (e.g., for a Mass Flow Controller, In-Situ Particle Monitor Devices or Endpoint Devices), this Network Communication Standard (NCS) with the related PROFIBUS standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor manufacturing equipment.

　

Referenced SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device

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