SEMI E54.9 - Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 13, 2008. Available at in July 2008; originally published February 2000; previously published July 2006.


NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.


NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.


This Standard defines a communication specification based on the Modbus/TCP protocol over a Transmission Control Protocol/Internet Protocol (TCP/IP) network to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.


Modbus/TCP over TCP/IP is a component level network which provides a simple, inexpensive, and fast means of exchanging data among control level industrial devices (e.g., sensors and actuators) and higher level devices such as controllers. Modbus/TCP over TCP/IP provides:

• A solution to low-level device networking,

• Access to intelligence present in low-level devices,

• Networking between higher level controllers, and

• Master/Slave and Peer-to-Peer communication capabilities.


Modbus/TCP specifies a communication model and protocol. The Physical, Data Link, and Network Layer definitions are defined by the network in which the Modbus/TCP protocol is embedded such as TCP/IP Ethernet.


This Document enables communications between intelligent devices on a SEMI compliant SAN by providing a presentation mapping of common and specific device network visible structure and behavior to Modbus/TCP over a TCP/IP network.


This Document specifies the protocol and services that compliant intelligent devices must support to exchange information over this semiconductor equipment sensor/actuator network.


This Document specifies the utilization of the Modbus/TCP protocol to present externally visible device structure and behavior, specified in the Common Device Model (CDM) and appropriate Specific Device Models (SDMs), for the Modbus/TCP protocol over a TCP/IP network.


This Document is used in conjunction with a SEMI Standard SAN Common Device Model specification, one or more SEMI Standard Specific Device Model (SDM) specifications (e.g., for a mass flow device), the Modicon Modbus Protocol Reference Guide and the Open Modbus/TCP Specification. Together, they describe the Modbus/TCP protocol, the externally visible data structures and behaviors of devices utilizing the Modbus/TCP networking capability in a SEMI compliant SAN system.


Referenced SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for In-Situ Particle Monitor Device
SEMI E54.11 — Specification Device Model for Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

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