SEMI E54.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in October 2017; originally published May 2000; previously published November 2011.

 

NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.

 

This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all in situ particle monitor devices on a semiconductor equipment Sensor/Actuator Communications Network.

 

An in situ particle monitor (ISPM) is a device that measures and counts particles. These devices classify by size and count, particles in the environment (gaseous, liquid, or vacuum) utilizing a technique such as detecting light from a sample region of the environment’s space. These counts are accumulated in bins and then reported. The number of bins varies by vendor and model.

 

This Specification specifically addresses the minimum attributes, services, and behavior an ISPM device must support to be interoperable on the sensor/actuator network.

 

This Specification is intended to ensure a high-degree of device interoperability on the sensor/actuator network, while still allowing flexibility for product differentiation and technology evolution.

 

The model specified in this Specification is used in conjunction with SEMI E54.1, Standard for Sensor/Actuator Network Common Device Model (CDM), to completely describe the ISPM as it appears from the network interface.

 

This Specification, together with SEMI E54, SEMI E54.1, and one of the Sensor/Actuator Network Communication Specifications, form a complete Interoperability Specification for the ISPM.

 

To comply with this Specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these Documents. Support for optional attributes, services, and behavior is not required to be compliant to this Specification. Optional attributes, services, and behavior are specified in these Documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device they must be implemented as identified in this Document.

 

Referenced SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model

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