SEMI E54.10 - Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device -

Abstract

An in situ particle monitor (ISPM) is a device that measures and counts particles. These devices classify by size and count, particles in the environment (gaseous, liquid, or vacuum) utilizing a technique such as detecting light from a sample region of the environment’s space. These counts are accumulated in bins and then reported. The number of bins varies by vendor and model.

This Specification specifically addresses the minimum attributes, services, and behavior an ISPM device must support to be interoperable on the sensor/actuator network.

This Specification is intended to ensure a high-degree of device interoperability on the sensor/actuator network, while still allowing flexibility for product differentiation and technology evolution.

The model specified in this Specification is used in conjunction with SEMI E54.1, Standard for Sensor/Actuator Network Common Device Model (CDM), to completely describe the ISPM as it appears from the network interface.

This Specification, together with SEMI E54, SEMI E54.1, and one of the Sensor/Actuator Network Communication Specifications, form a complete Interoperability Specification for the ISPM.

To comply with this Specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these Standards. Support for optional attributes, services, and behavior is not required to be compliant to this Specification. Optional attributes, services, and behavior are specified in these Standards to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device they must be implemented as identified in this Standard.

Referenced SEMI Standards (purchase separately)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model

Revision History
SEMI E54.10-0600 (Reapproved 0124)
SEMI E54.10-0600 (Reapproved 1017)
SEMI E54.10-0600 (Reapproved 1111)
SEMI E54.10-0600 (Reapproved 1106)
SEMI E54.10-0600 (first published)

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