SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at and in March 2016; originally published in 2001; previously published December 2011.

NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.

This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment Sensor/Actuator Communication Network.

An EPD is a device that measures and monitors process characteristics to determine when a specific threshold or event has been obtained usually to signal the completion of a process or process step. These EPDs are, but not limited to, devices that may classify a process endpoint by determining the size and count of particles in the process environment, detecting and determining optical light from a sample region of the environment’s space, or determining motor current of an equipment component.

This Specification specifically addresses the minimum attributes, services and behavior an EPD must support to be interoperable on the Sensor/Actuator Network.

This Specification is intended to ensure a high-degree of device interoperability on the Sensor/Actuator Network, while still allowing flexibility for product differentiation and technology evolution.

The model specified in this Specification is used in conjunction with the Sensor/Actuator Network Common Device Model (CDM) to completely describe the EPD as it appears from the network interface.

This Specification, together with the Sensor/Actuator Network Standard, the Sensor/Actuator Network CDM, and a Sensor/Actuator Network Communication Specification, form a complete interoperability specification for the EPD.

To comply with this Specification, a device must implement and support, at a minimum, the required attributes, services, and behavior identified in these documents. Support for optional attributes, services and behavior is not required to be compliant to this Specification. Optional attributes, services, and behavior are specified in these documents to promote further device interoperability as features evolve and are adopted by more manufacturers. If optional attributes, services, and behavior are implemented for this device they must be implemented as identified in this Document.

Referenced SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model

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