SEMI E54.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) -

Abstract

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1  Purpose
1.1  Introduction
1.1.1  This Standard defines a communication specification based on the EtherNet/IPTM  (Ethernet/Industrial Protocol) network to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing tool.
1.2  Motivation
1.2.1  EtherNet/IP is a communication system suitable for use in industrial environments. EtherNet/IP allows intelligent devices to exchange time-critical application information. These devices include simple I/O devices such as sensors/actuators, as well as complex control devices such as robots, programmable logic controllers, and process controllers.
1.2.2  EtherNet/IP uses Common Industrial Protocol (CIP), the common network, transport and application layers also shared by DeviceNet (SEMI E54.4). EtherNet/IP provides:
• A cost effective solution to bridge factory Ethernet (IEEE 802.3) networks to SEMI E54.4 DeviceNet low-level device networks,
• Access to intelligence present in low-level devices, and
• Producer/Consumer model for Client/Server and Peer-to-Peer application relationships.
1.3  Background
1.3.1  EtherNet/IP makes use of standard Ethernet and TCP/IP technology to transport CIP communications packets. The result is a common, open application layer on top of open and highly popular Ethernet and TCP/IP protocols.
1.3.2  EtherNet/IP provides a producer/consumer model for the exchange of time-critical control data. The producer/consumer model allows the exchange of application information between a sending device (e.g., the producer) and many receiving devices (e.g., the consumers) without the need to send the data multiple times to multiple destinations. For EtherNet/IP, this is accomplished by making use of the CIP network and transport layers along with IP Multicast technology. Many EtherNet/IP devices can receive the same produced piece of application information from a single producing device.
1.3.3  EtherNet/IP makes use of standard IEEE 802.3 technology; there are no nonstandard additions that attempt to improve determinism. Rather, EtherNet/IP recommends the use of commercial switch technology, with 100 Mbps bandwidth and full-duplex operation, to provide for more deterministic performance.
2  Scope
2.1  Specification — This Standard specifies a sensor/actuator network communications standard (NCS) based on the EtherNet/IP specification that enables communication with SAN devices configured according to SEMI SAN common device model (CDM) and appropriate specific device model (SDM) Specifications.
2.2  Use — This Standard is used in conjunction with a SEMI Standard SAN CDM Specification and one or more SEMI Standard SDM Specifications (e.g., for a mass flow controller). Together, they describe the externally visible data structure and behavior of devices utilizing the EtherNet/IP networking capability in a SEMI compliant SAN system. The general sensor/actuator network document architecture is described in the SEMI E54 Sensor/Actuator Network Standard (the root SAN Standard).
2.3  Document Structure — The EtherNet/IP network communication standard complies with the SEMI SAN NCS template document structure, as described in SEMI E54. The standard document is composed of two main parts. The first part (§§ 1 through 8) specifies the SAN enabling protocol as well as the presentation (i.e., mapping) of CDM object structure and behavior onto the network (referred to as the ‘CDM mapping’). The second part (§ 9) specifies the presentation (i.e., mapping) of SDM object structure and behavior onto the network for each SEMI specified SDM (referred to as the ‘SDM mapping’).
2.4  Adding SDM Mappings — SDM mappings added to part two of this document are considered document additions and are balloted as such. An SDM mapping may only be balloted for addition to this document if the corresponding SEMI SDM has been standardized.

Referenced SEMI Standards (purchase separately)
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.2 — Guide for Writing Sensor/Actuator Network (SAN) Standard Ballots
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.4 — Standard for Sensor/Actuator Network Communications for DeviceNet
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
SEMI E54.22 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
SEMI E54.24 — Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENSen)

Revision History
SEMI E54.13-0425 (technical revision)
SEMI E54.13-1011 (technical revision)
SEMI E54.13-0303 (first published)

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