SEMI E54.15 - Sensor/Actuator Network Communication Specification for SafetyBUS p -
Abstract
NOTICE: This document is no longer published with the SEMI E54 suite of standards. It is published and sold separately.
This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007. Originally published February 2005; previously published July 2006.
This standard defines a communication specification based on the SafetyBUS p protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI specified device models (common and device specific) in a semiconductor manufacturing equipment.
Referenced SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS)
SEMI E54 — Sensor/Actuator Network Standard
SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for an Endpoint Device
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
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