SEMI E54.16 - Specification for Sensor/Actuator Network Communications for LonWorks -

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Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E54.16-1106 (Reapproved 1211) - Inactive



This Standard was technically approved by the global Information & Control Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at and in December 2011; originally published July 2005; previously published November 2006.

NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.


This Specification defines a communication specification based on the ANSI/EIA/CEA 709.1 Control Networking Protocol (LonWorks) to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate in accordance with SEMI-specified device models (common and device specific) on semiconductor manufacturing equipment.


This Document specifies a mapping of the SEMI common device model (CDM) onto LonWorks technology using the LonMark interoperability guidelines established for LonWorks devices. The LonMark International Association will review and approve the enhanced SEMI LonMark functional profiles presented in this network communication Document and incorporate the required SEMI profiles into the LonMark Interoperability Guidelines.


Background and Motivation The LonWorks communications system provides interconnection of smart control devices such as sensors, actuators, and controllers in a fast-response time, low-cost network for industrial use. LonWorks enables multiple devices to share a single network, thereby significantly reducing the point-to-point wiring between controllers, sensors, and actuators. The LonWorks network communications standard (NCS) is based on the seven-layer ANSI/EIA/CEA 709.1 (LonWorks) protocol, implemented by the Neuron Chip, a physical layer transceiver, and an optional host processor. The ANSI/EIA/CEA 709.1 (LonWorks) control networking protocol was developed by Echelon and may be freely licensed for implementation on any hardware platform. The SEMI NCS for LonWorks is based on the LonMark interoperability guidelines, which provide a framework for interoperable use of the ANSI/EIA/CEA 709.1 (LonWorks) protocol at layers 1 through 6, as well as at the application layer. Where the LonMark interoperability guidelines do not provide the functionality required by the SEMI CDM and the SEMI specific device models (SDM), the guidelines are extended with SEMI-specific enhanced profile requirements.



Referenced SEMI Standards

SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54 — Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device

SEMI E54.11 — Specification for Sensor/Actuator Specific Device Model for an Endpoint Device

SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device

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