E05418 - SEMI E54.18 - 真空ポンプ機器専用のセンサ/アクチュエータネットワークのデバイスモデルの仕様

Volume(s): Equipment Automation Software
Language: Japanese
Type: Single Standards Download (.pdf)

本スタンダードは,global Information & Control Technical Committeeで技術的に承認されている。現版は2011912日,global Audits and Reviews Subcommitteeにて発行が承認された。201112月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は20063月発行。前版は200611月発行。


注意: 本文書は,SEMI E54一連のスタンダードとして出版されず,単独で発行および販売される。






Referenced SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E54 — Sensor/Actuator Network Standard

SEMI E54.1 — Standard for Sensor/Actuator Network Common Device Model

SEMI E52 — Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers

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