SEMI E54.19 - Specification for Sensor/Actuator Network for MECHATROLINK
This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 22, 2018. Available at www.semiviews.org and www.semi.org in October 2018; originally published March 2007; previously published June 2014.
NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.
This Document defines a communication specification based on the MECHATROLINK protocol to enable communications between intelligent devices on a sensor/actuator network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.
This Document gives interoperability with SEMI E54 common/specific device model based sensor/actuator devices.
This Document specifies how sensor/actuator/controller devices interoperate on the network specific for the MECHATROLINK Public specification referenced in § 4, as a part of equipment’s control system.
This Document defines relation with main part of SEMI E54 including common device model (CDM) and existing specific device models (SDMs). This Document is to be used with the CDM and one or more SDMs, as well as the MECHATROLINK public specification.
Referenced SEMI Standards
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
SEMI E54.22 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauge
SEMI E54.24 — Specification for Sensor/Actuator Network Specific Device Model of Generic Equipment Network Sensor
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