SEMI E54.20 - Specification for Sensor/Actuator Network Communications for EtherCAT® -

Abstract

1  Purpose
1.1  This Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the EtherCAT®  standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.
1.2  EtherCAT is a vendor independent, open field bus standard for a wide range of applications in manufacturing, process and building automation, supported by the EtherCAT Technology Group (ETG) .
1.3  The application model of EtherCAT is compatible with the model of CANopen® . The same mapping rules apply.
1.4  EtherCAT is optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at the device level.
 

2  Scope
2.1  This Standard specifies a SAN communications standard based on the EtherCAT specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.
2.2  In conjunction with a SEMI Standard SAN Common Device Model (CDM) Specification and one or more SEMI Standard Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related EtherCAT standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor manufacturing equipment.

Referenced SEMI Standards (purchase separately)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
SEMI E54.22 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pressure Gauges
SEMI E54.24 — Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENSen)

Revision History
SEMI E54.20-0624 (technical revision)
SEMI E54.20-0316 (technical revision)
SEMI E54.20-1108 (Reapproved 0713)
SEMI E54.20-1108 (technical revision)
SEMI E54.20-1107 (first published)

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