SEMI E54.20 - Specification for Sensor/Actuator Network Communications for EtherCAT -

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Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E54.20-0316 - Current



This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 4, 2015. Available at and in March 2016; originally published November 2007; previously published July 2013.


NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately.


This Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the EtherCAT standard. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.


EtherCAT is a vendor independent, open field bus standard for a wide range of applications in manufacturing, process and building automation, supported by the EtherCAT Technology.


The application model of EtherCAT is compatible with the model of CANopen. The same mapping rules apply.


EtherCAT is optimized for high speed and inexpensive connectivity between automation control systems and distributed I/O at the device level.


This Document specifies a SAN communications standard based on the EtherCAT specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services, and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.


In conjunction with a SEMI Standard SAN Common Device Model (CDM) Specification and one or more SEMI Standard Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related EtherCAT standard describe the data structures, interactions, and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators, and controllers in semiconductor manufacturing equipment.


Referenced SEMI Standards

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model

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