SEMI E54.21 - Specification for Sensor Actuator Network for Motionnet Communication

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at and in May 2017; originally published November 2010.


NOTICE: This Document was reapproved with minor editorial changes.


This Document defines a communication specification based on the MOTIONNET® protocol to enable communications between intelligent devices on a Sensor/Actuator Network (SAN) that operate according to SEMI E54 device models on semiconductor manufacturing equipment.


This Document gives interoperability with SEMI E54 common/specific device model based Sensor/Actuator devices.


This Document specifies how Sensor/Actuator/Controller devices interoperate on the network specific for the MOTIONNET Public specification referenced in the § 4, as a part of equipment’s control system.


This Document defines relation with main part of SEMI E54 including Common Device Model (CDM) and existing Specific Device Models (SDMs). This Document is to be used with the CDM and one or more SDMs, as well as the MOTIONNET Public Specification.


Referenced SEMI Standards

SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Specific Device Model for Vacuum Pump Device

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