SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-LINK® IE -

Abstract

1  Purpose
1.1  This Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the CC-Link IE®  specifications including variants CC-Link IE Field Network and CC-Link IE TSN, hereinafter collectively referred to as CC-Link IE. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC Link IE specification completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.
1.2  CC-Link IE is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.
2  Scope
2.1  This Standard specifies a SAN communications standard based on the CC-Link IE specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.
2.2  In conjunction with a SEMI Standard SAN Common Device Model (CDM) specification and one or more SEMI Standard Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard with the related CC-Link IE specification describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device
SEMI E54.11 — Specific Device Model for Endpoint Devices
SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E54.23-0526 (technical revision)
SEMI E54.23-0520 (technical revision)
SEMI E54.23-0719 (technical revision)
SEMI E54.23-0513 (first published)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.