SEMI E54.23 - Specification for Sensor/Actuator Network Communications for CC-LINK® IE -

Abstract

This Specification is part of the SEMI Sensor/Actuator Network (SAN) suite of Standards and defines a specific communications protocol based on the CC-Link IE^® standards including variants CC-Link IE Field Network and CC-Link IE TSN, hereinafter collectively referred to as CC-Link IE. This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the CC‑Link IE standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment.

CC-Link IE is a vendor independent, open device level network standard. Vendor independence and openness are guaranteed by the CC-Link Partner Association.

This Document specifies a SAN communications standard based on the CC-Link IE specification that is in compliance with SEMI E54.1. As such, it specifies the protocol, services and behavior that compliant intelligent devices must support in order to interchange information over this SAN in a method compatible with SEMI E39.

In conjunction with a SEMI Standard SAN Common Device Model (CDM) specification and one or more SEMI Standard Specific Device Model (SDM) Specifications (e.g., for a mass flow controller), this Network Communication Standard (NCS) with the related CC-Link IE standard describe the data structures, interactions and behavior that are characteristic of the various devices on the network. This composite model forms a complete interoperability standard for communications among intelligent sensors, actuators and controllers in semiconductor manufacturing equipment.

Referenced SEMI Standards

SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services

SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model

SEMI E54.3 — Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device

SEMI E54.10 — Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device

SEMI E54.11 — Specific Device Model for Endpoint Devices

SEMI E54.18 — Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device 

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