SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) -

Abstract

This Standard describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network.

This Standard is applicable to sensors which are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this Standard.

This Standard does not define terms which have been defined already in other referenced Standards.

Referenced SEMI Standards (purchase separately)
SEMI E39 — Specification for Object Services: Concepts, Behavior, and Services
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E90 — Specification for Substrate Tracking

Revision History
SEMI E54.24-1116 (Reapproved 0124)
SEMI E54.24-1116 (first published)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.