E05424 - SEMI E54.24 - Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 21, 2016. Available at www.semiviews.org and www.semi.org in November 2016.


This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor/Actuator Network. The specific purpose of this Specification is to describe a network-independent application model of a generic sensor device measuring one or more phenomena on a piece of semiconductor manufacturing equipment and communicating over a sensor/actuator communication network. Oftentimes such sensors are added onto the equipment as they might provide a capability that is not provided with the current equipment configuration.


This Document describes a specific device structure and behavior of a generic equipment networked sensor. This could include a sensor added onto the equipment that communicates over a sensor/actuator communication network. It could also include a sensor that is part of the default configuration of the equipment, communicating over a sensor/actuator communication network.


This Document is applicable to sensors which are regarded as data producers only. A configuration or control of the sensor device (e.g., described by a third entity) is outside the scope of this Standard.


This Document does not define terms which have been defined already in other referenced Documents.


Referenced SEMI Standards

SEMI E39 — Object Services Standard
SEMI E54 — Specification for Sensor/Actuator Network
SEMI E54.1 — Specification for Sensor/Actuator Network Common Device Model
SEMI E90 — Specification for Substrate Tracking

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