SEMI E56 - Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www.semiviews.org and www.semi.org in March 2017; originally published November 2004; previously published August 2015.
The purpose of this Document is to provide a standardized method to quantify the accuracy, linearity, repeatability, short-term reproducibility, hysteresis, and dead band of a thermal mass flow controller (MFC).
The intent of this Document is not to suggest any specific testing program but to specify the test method to be used when testing for parameters that are covered by this method. The user might use this Document to check significant performance characteristics such as accuracy, precision, bias, repeatability, linearity, short-term reproducibility, and dead band under a set of closely controlled test conditions.
The significance of the accuracy calculations in this method is to allow an MFC user to transfer a process from one manufacturing tool to another and to exchange MFCs within a single manufacturing tool while maintaining process control.
This Document describes the conditions and procedures for testing the accuracy, linearity, repeatability, hysteresis, and dead band of thermal MFCs. Because of the generic nature of this Document, not all test procedures apply to all types of MFCs.
This Document provided a common basis for communication between manufacturers and users.
Referenced SEMI Standards
SEMI E17 — Guide for Mass Flow Controller Transient Characteristics Tests