SEMI E57 - Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Physical Interfaces & Carriers Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 11, 2016. Available at www.semiviews.org and www.semi.org in June 2016; originally published in 1996; previously published November 2010.

 

This Standard specifies the mechanical couplings used to ergonomically align and precisely support 300 mm wafer carriers (including transport cassettes, process cassettes, quartz boats, pods, lot boxes, and shipping boxes). Such a kinematic coupling can be used at several interfaces, including:

  • between a box or cassette and a tool load-port or vehicle nest,
  • between a transport cassette and a box, and
  • between a process cassette or quartz boat and the floor of a process chamber.

 

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces. Only the bottom half of the kinematic coupling is specified so that suppliers can be flexible in designing wafer carriers that can mate with it.

 

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port
SEMI E19 — Standard Mechanical Interface (SMIF)
SEMI E19.4 — 200 mm Standard Mechanical Interface (SMIF)

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