SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services -

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Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI E58-0703 - Inactive



This standard was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information & Control Committee. Current edition approved by the North American Regional Standards Committee on October 19, 2000. Initially available at January 2001; to be published March 2001. Originally published June 1997.


NOTICE: The designation of SEMI E58 was updated during the 0703 publishing cycle to reflect the reapproval of SEMI E58.1.


This document provides standards for implementing and collecting SEMI E10 state changes at the equipment level per SEMI E10. SEMI E10 defines various terms and equipment states but was not written specifically for application by automated equipment. This document is intended to provide a consistent interpretation of these equipment states through formal state model methodology. ARAMS defines concepts, behavior, and message services to support the integration of automated systems within a semiconductor factory. To implement the integration of SEMI E10 states on automated equipment, integration of definitions and requirements must be detailed and precise to ensure interpretations are consistent across equipment suppliers. This provides an opportunity to automatically retain information at the equipment itself. Both equipment supplier and equipment user benefit from the automation of SEMI E10 data collection at the equipment through application of a consistent state model. SEMI E10 defines specific states but does not address transitions between states. The ARAMS standard specifies the triggers for state transitions made by automated equipment. Extensions to SEMI E10 described in this document apply to decisions made by automated equipment only.


Subordinate Standard:

SEMI E58.1-0697 (Reapproved 0703) - SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services


Referenced SEMI Standards

SEMI E10 — Standard for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E30 — Generic Model for Communications and Control of SEMI Equipment (GEM)
SEMI E38 — Cluster Tool Module Communications (CTMC)
SEMI E39 — Object Services Standard: Concepts, Behavior, and Services
SEMI E41 — Exception Management (EM) Standard
SEMI E42 — Recipe Management Standard: Concepts, Behavior, and Message Services
SEMI E53 — Event Reporting

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